Burn that PDMS
I have a layer of PDMS about a micron thick that has been spin coated onto a piece of MgF coated glass and cured, and now I want to etch a pattern into it. I spin coat photoresist over the top, removed the unexposed stuff and now need to get rid of the PDMS. Now looking around in papers, the about the only things I can find to remove it are 95% pure sulphuric acid, and some other acid (trifluoroacetic acid or something) and this seems a bit vicious to me and I don't think the photoresist will survive either. Does anyone here know how I might etch this pattern using something a little less nasty?