Burn that PDMS

[bloggerofdeath]

I have a layer of PDMS about a micron thick that has been spin coated onto a piece of MgF coated glass and cured, and now I want to etch a pattern into it. I spin coat photoresist over the top, removed the unexposed stuff and now need to get rid of the PDMS. Now looking around in papers, the about the only things I can find to remove it are 95%

Comments

[lost_in_moose]

Well I've asked the only two people on here I can think of too ask and one of them doesn't know. The other I'm hoping will respond once he's not playing WoW :) You might have to wait a while for that one :D

What is PDMS and since you've coated it in photo resist can't you break it down using something other than an acid since an acid is what you etched the photoresist with?

Actually I think if you mean this PDMS (Polydimethylsiloxane) then you might be buggered... but I suck at science!

[bloggerofdeath]

I meant to post this to a livejournal community, but posted it in my blog by mistake :)

the photoresist doesn't dissolve in acid, it dissolves in acetone :) so I expose the photoresist, wash away the unexposed stuff in acetone, then burn the exposed bit of PDMS away